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Critical control for gas delivery systems		MASS FLOW CONTROLLER  SEC-Z500 series
		MULTI GAS / MULTI RANGE MASS FLOW CONTROLLER HORIBASTECs SEC-Z500 series multi gas / multi range mass flow controller has been developed to reduce the number of mass flow controllers required to cover the range of flows and gases used in todays Semiconductor Processes.
View:   Details of configuration		Advantage of SEC-Z500 High Performance with 32 bit CPU Multi Range / Multi Gas Only 6 mass flow controllers needed to cover the range 30SCCM to 10SLM Ultra Quick Response Quick responding at any set point Easy to configure on at point and time of use see how to configure our mass flow controller Dramatically reduce the stock Compatible to conventional analog MFC Simultaneous communication on Analog / Digital Technology for Multi Range / Multi Gas Mass Flow Controller High Reliability Sensor High performance CPU (Calculation Point and Multi Gas PID) Actual Gas Flow Data   The SEC-Z500 Original (factory set) Full Scale can be re-ranged anywhere between 25% and 100%FS. For example: SEC-Z500 Type "4"   N2 1000SCCM Control Range 20 to 1000SCCM Change into 25% FS N2 250SCCM Control Range 5 to 250SCCM Control range after changing FS remains 2 to 100% FS.