|
Vapour controller replacing bubblers for vacuum coating systems |
LIQUID SOURCE VAPORIZATION / DELIVERY SYSTEMS
The compact liquid vaporizer alternative to baking or bubbler systems.
Used within the Semiconductor manufacturing, glass coating and industrial coating industries.
Liquid Source
Vaporization Control System
The compact point of use
liquid vaporizer / injection valve, can be used to replace the
bubbler or baking system for a wide range of vacuum coating applications.
Different models can be used
in conjunction with either a liquid mass flow meter or a high
temperature mass flow controller.
View:
Liquid and carrier gas MI series
PDF direct liquid injection system datasheet
- Compact-1/5 the Size of Previous Models,
considerably smaller than conventual baking or bubbler systems.
- Fast, Complete Vaporization allowing
for liquid delivery much closer to the point of use, reducing the
risk of condensation and the need for long heated lines.
- Installation Flexible
- Suitable for Semiconductor Films, such
as LPCVD, MCVD, TEOS, TMPO, TMOA, TiCl4, MOCVD, PECVD, SACVD, HMDSO etc.
- Suitable for the Next Generation of Semiconductor Materials, such as Thin Ferroelectric Films, Ba, Ta, Ti, TiCl4, SiCl4 and more.
-
Other applications include SiO2 thin film, Silicon Nitride, H2O water vaporisation for fuel cell applications,