Thin film process control and inspection.
A range of products are available from JYHORIBA for thin film process control and inspection. For further information please visit www.jobinyvon.com
Thin Film Metrology
-
Spectroscopic Ellipsometry from DUV to NIR
- Combined Laser Ellipsometry & Reflectometry*
Applications include:
-
Film thickness & optical constants
- Broad range
of applications from ultra-thin films to complex multilayer stacks
- Reflection and transimission data
Advanced Process Control
-
Optical Emission Spectroscopy
- Imaging
Interferometry
- Depth Polarimetry
Applications include:
-
Real-time plasma analysis
- Advanced
Endpoint detection
- In-Situ trench depth monitoring
* formerly
Philips Analytical Laser Ellipsometry