STECs New Devicenet mass flow controllers

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300mm, 0.13µm technology drives the demand for DeviceNet™ Mass Flow Controllers

STEC, the world leader in mass flow technology, has launched two new DeviceNet™ Digital mfcs.

300mm-wafer and smaller line width technology is driving the development of compact, multi-functional, fast and accurate control components for 300mm process tools. One of the most critical control components in any system is the mass flow controller

Devicenet mass flow control from STEC To achieve the new system demands mfc manufacturers are changing from analog to digital control. STEC was the first mfc manufacturer to develop a digital mfc back in 1990. Since then different models with various communication interfaces have been developed and a great deal of field experience gained.

STEC’s Europe sales and marketing manager Stuart Knight says ”The largest semiconductor equipment supplier and biggest device makers have decided to use DeviceNet™ as the standard digital communication protocol and we expect the rest of the industry to follow. ” He goes on to say, “As the industry leader in mfc technology STEC were heavily involved in the development of this new standard. I am pleased to say that full qualification has been achieved at key system makers so we are now pleased to introduce two new DeviceNet™ digital mfcs. The SEC Z10D/Z20D series, which use a high specification piezo valve, and the SEC V20D series, which utilises a lower cost solenoid, valve.”

These two new Digital DeviceNet™ mfcs offer many advantages over analog technology

Fast, less than 1 second to any set point

Accuracy better than 1.0% F.S.

Flexibility Multiple calibration data can be stored in the mfc so different gas and flow rates can be selected by the user

Wiring Simpler, lower cost and no chance of miss-communication

DeviceNet™ Full ‘intelligent’ networking capability included in each individual mfc

Compact Can be used on the new 30mm width Integrated Gas Panels so ~40% less space required (Up to 30slm flow rate for piezo valve version. Size based on SEMI Provisional Standard No.2787)

Intelligent Self-diagnostics check for future problems.

For further details please contact Stuart Knight (European sales manager)

+44 1604 542600. semi.hil@horiba.com

<<Home <<News index

300mm, 0.13µm technology drives the demand for DeviceNet™ Mass Flow Controllers
STEC, the world leader in mass flow technology, has launched two new DeviceNet™ Digital mfcs. 300mm-wafer and smaller line width technology is driving the development of compact, multi-functional, fast and accurate control components for 300mm process tools. One of the most critical control components in any system is the mass flow controller To achieve the new system demands mfc manufacturers are changing from analog to digital control. STEC was the first mfc manufacturer to develop a digital mfc back in 1990. Since then different models with various communication interfaces have been developed and a great deal of field experience gained. STEC’s Europe sales and marketing manager Stuart Knight says ”The largest semiconductor equipment supplier and biggest device makers have decided to use DeviceNet™ as the standard digital communication protocol and we expect the rest of the industry to follow. ” He goes on to say, “As the industry leader in mfc technology STEC were heavily involved in the development of this new standard. I am pleased to say that full qualification has been achieved at key system makers so we are now pleased to introduce two new DeviceNet™ digital mfcs. The SEC Z10D/Z20D series, which use a high specification piezo valve, and the SEC V20D series, which utilises a lower cost solenoid, valve.” These two new Digital DeviceNet™ mfcs offer many advantages over analog technology Fast, less than 1 second to any set point Accuracy better than 1.0% F.S. Flexibility Multiple calibration data can be stored in the mfc so different gas and flow rates can be selected by the user Wiring Simpler, lower cost and no chance of miss-communication DeviceNet™ Full ‘intelligent’ networking capability included in each individual mfc Compact Can be used on the new 30mm width Integrated Gas Panels so ~40% less space required (Up to 30slm flow rate for piezo valve version. Size based on SEMI Provisional Standard No.2787) Intelligent Self-diagnostics check for future problems. For further details please contact Stuart Knight (European sales manager) +44 1604 542600. semi.hil@horiba.com