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The Digital MFC Solution

The Semiconductor Industry has entered into a more critical process phase demanding higher performance, higher quality, and more intelligent fluid control with the ability to perform e-diagnostics.  STEC's new SEC-Z300 and 500 series are the solution offering multi-gas / multi-range flexibility, spares reduction, user-friendly software, and quick configurability.  This DMFC is the solution for new systems and/or retrofit upgrades.

STEC is committed to a philosophy of continuous improvement.  In this way, we can best serve the needs of our customers all over the world and solidify and extend our leadership role in the field of fluid control.

The STEC SEC-Z300 / Z500 Seriesmulti-gas / multi-range mass flow controller from STEC Z300

  • Fastest Response for all Setpoints, Utilizing Piezo Valve, High Speed CPU, and Latest Technology Sensor

  • Ultra Clean Surface Finish and Minimized Welding Points
  • Unibody Valve: One Moving Part
  • RS-485 Serial Bus Communication
  • User Friendly Software
  • Fit - Form - Function for Retrofitting Other Major Brand MFCs
  • 20 pinCE and 9 pinD Electrical Connectivity
  • 5 sccm to 10 slm (30 to 50 slm range coming soon)