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Residual Gas Analyser View: RGA Main		Residual Gas Analyzer Mass spectrometer system
PlasmGuard (SMPA) *1 SMPA-1-2/45 SMPA-11-2/45 SMPA-7-2/65 SMPA-5-2/65 SMPA-5-2/100 SMPA-1-4/300 Micropole Analyzer (MPA) *1 MPA6-1-2/45 MPA6-11-2/45 MPA6-7-2/65 MPA6-5-2/65 MPA6-5-2/100 MPA6-1-4/300 Mass Range (AMU) 2~45 2~45 2~65 2~65 2~100 4~300 Resolution (FWHM) 0.5 AMU 1.5 AMU 0.9 AMU 0.8 AMU 1 AMU 1.5 AMU Maximum Operating Pressure N2 0.133Pa 1mTorr 1.466Pa 11mTorr 0.933Pa 7mTorr 0.666Pa 5mTorr 0.666Pa 5mTorr 0.133Pa 1mTorr Minimum Detectable Partial Pressure for Slow Scan Updates 1.33*10-8 Pa N2 1*10-10 Torr N2 Fastest Scan Updates / AMU 0.6 sec Minimum Detectable He Leak Rate 2*10-9 Pa m3/sec 2*10-8 atm cm3/sec 2*10-8 Pa m3/sec 2*10-7atm cm3/sec 2*10-9 Pa m3/sec 2*10-8 atm cm3/sec Filament Material Y2O3/lr (standard) or Pure W Maximum Operating Temperature 150°C (Max. bake out temperature : 350°C Flange Type C: Ø34 Conflat Flange Type K : KF-16 Flange Spectra Converter Type *2 SC6-18 SC6-14 SC6-11 SC6-07   Digital Interface RS232C / RS485 (Selected Baud Rate : 9,600 / 19,200 / 38,400 Software WinMPA (Microsoft Windows XP, 2000, Me, NT4.0, 95/98, 3.1, 3.11) *1. Micropole Analyzer has two types (MPA / SMPA). SMPA is protected by a mesh, on the vacuum fitting, designed to extend the lifetime of the sensor in harsh environments such as plasma processes. *2. Chose electron energy, 70eV or 43eV through PC *AMU : Atomic Mass Unit