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Residual Gas Analyser		Residual Gas Analyzer Mass spectrometer system
View: Specification pdf brochure		Micropole™ System, the worlds smallest complete mass spectrometer system. The small size, low cost, and component interchangeability provides the users with easy upgrades, troubleshooting, and replacement.
Micropole™ is a miniature array of quadrupole mass spectrometers which has 9 detection parts using 16 original column electrodes. This allow for easy integration into small spaces whilst still getting state of the art resolution. In addition, the ability to operate at higher pressures without using a differential pump, makes this suitable for gas monitoring, both during process and after chamber cleaning. Principle Filament Atoms and molecules are ionized in a signal ion source following electron impact. Electrons are emitted from the hot filaments. Quadrupole Ions with a specific mass-to-charge ratio are filtered by applying a combination of DC and RF voltages to each quadrupole. Faraday Cup Mass filted ions are collected by the Faraday cup detectors.