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PR-PD3 Main External Dimensions		Reticle and Mask Particle Detection System Inspection object Particles on reticle/mask with or without pellicle Principle Laser scattering method Inspection time Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection * High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available. Detectable particle size Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent) Reticle size 5, 6 or 7 inch (Please specify when ordering.) Reticle cassette (Please specify when ordering) Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.) Inspection result Data mapping display on the FPD Dimensions Approx. 900 (W) x 1350 (D) x 1590 (H) mm Approx. 35.4 (W) x 53.1 (D) x 62.6 (H) in (Dimensions will vary depending on the reticle cassette specifications.) Installation site Clean room or clean booth, class 100 or better Temperature 23 ±1°C Power 100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase Vacuum source Pressure difference 8.0 x 104 Pa or more, 50 L/min