Pressure Insensitive Mass Flow Controller

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New Digital Pressure Insensitive (PIMFC) "Combined Component" Mass Flow Controller

The Semiconductor Industry has entered into a more critical process phase demanding higher performance, higher quality, and more intelligent fluid control with the ability to perform E-Diagnostics. STEC's new SEC-Z70D series is the solution, offering multi-gas/multi-range flexibility, spares reduction, user-friendly software, and quick configurability. The latest challenge was to design a new model that combines a pressure regulator, filter, pressure sensor, temperature sensor, and digital MFC all in the footprint of an MFC. Here it is!

The STEC SEC-Z70D Pressure Insensitive Mass Flow Controller

Piezo Valve, High Speed CPU, and Latest Technology Sensor

Pressure Regulator

Pressure Sensor with LCD Readout on top of MFC Cover

Filter 5 micron (or optional per customer spec)

Ultra Clean Surface Finish, 5 Ra (max), and Minimized Welding Points

Unibody Valve-One Moving Part

DeviceNet™

5 sccm to 10 slm (30 to 50 slm range coming soon)

Eliminates Three Gas Stick Components: Plus the IGS Blocks

Pressure Regulator

Pressure Sensor

Filter

Saves Space (3 inch Panel Reduction)

Cost Reduction of Gas Panel

STEC is committed to a philosophy of continuous improvement. In this way, we can best serve the needs of our customers all over the world and solidify and extend our leadership role in the field of fluid control.

<<Home <<News index

New Digital Pressure Insensitive (PIMFC) "Combined Component" Mass Flow Controller
The Semiconductor Industry has entered into a more critical process phase demanding higher performance, higher quality, and more intelligent fluid control with the ability to perform E-Diagnostics. STEC's new SEC-Z70D series is the solution, offering multi-gas/multi-range flexibility, spares reduction, user-friendly software, and quick configurability. The latest challenge was to design a new model that combines a pressure regulator, filter, pressure sensor, temperature sensor, and digital MFC all in the footprint of an MFC. Here it is! The STEC SEC-Z70D Piezo Valve, High Speed CPU, and Latest Technology Sensor Pressure Regulator Pressure Sensor with LCD Readout on top of MFC Cover Filter 5 micron (or optional per customer spec) Ultra Clean Surface Finish, 5 Ra (max), and Minimized Welding Points Unibody Valve-One Moving Part DeviceNet™ 5 sccm to 10 slm (30 to 50 slm range coming soon) Eliminates Three Gas Stick Components: Plus the IGS Blocks Pressure Regulator Pressure Sensor Filter Saves Space (3 inch Panel Reduction) Cost Reduction of Gas Panel STEC is committed to a philosophy of continuous improvement. In this way, we can best serve the needs of our customers all over the world and solidify and extend our leadership role in the field of fluid control.