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Replacing bubblers for vacuum coating applications		New Generation Mixing Injection Valve PRE-PRODUCTION MODELS
The direct injection system can be used for the latest high K, low K, metal deposition and BPSG materials.		Liquid Source Vaporization Control System The compact point of use vaporizer, can be used to replace bubbler technology especially for vacuum coating applications. The MI / MV mixing injector system from HORIBASTEC efficiently vaporizes and accurately controls the delivery of liquid based materials to the process. The MI / MV replaces older bubbler technology, which inherently has stability problems caused by variations in temperature and pressure.
View: Direct liquid injection systems Liquid (no carrier gas) vaporization system Specification		System Configuration Example HORIBASTEC's MI measures the flow rate by mass using a high performance liquid mass flow meter (LFM) and the liquid source is vaporized by the MI. Simultaneously, the flow measurement signal from the LFM is routed to the MI, optimising control. The SEC series mass flow controller controls the introduction of the carrier gas to the MI. This system is capable of vaporization of liquid sources and vaporization into normal pressure environments.