|
Mass Flow Meter |
Mass Flow Controller |
|
Model
Name |
LF-210 |
LF-310 |
LF-410 |
LF-510 |
LF-610 |
LV-210(MO) |
LV-310(MO) |
LV-410(MO) |
LV-510(MO) |
LV-610(MO) |
|
Flow Range
(F.S. ml/min) |
0.02/0.05/01 |
0.2/0.5 |
1/2/5 |
10/20 |
50/100 |
0.02/0.05/0.1 |
0.2/0.5 |
1/2/5 |
10/20 |
50/100 |
|
Controllable/Measurable Range |
5 - 100% Full Scale
(Accuracy Guaranteed) |
|
Applicable Liquid |
Excluding corrosive liquid
for Stainless Steel like HCl, HF, etc. |
|
Viscosity |
Max. 100cP |
Max. 10cP |
|
Accuracy |
±2% F.S. (Linearity:
±2% F.S., Repeatability: = 1% F.S.) |
|
Operating Temperature |
5-50°C (15-35°C
Accuracy Guaranteed) |
|
Operating Pressure |
Max. 5 MPa
Max. 50 kg/cm2G |
Max. 50kPa~300kPa
Max. 0.5~3.0kg/cm2G |
|
Pressure Resistance |
|
|
|
Pressure Drop |
20/50Pa
2/5mm H2O |
100/200/500Pa
10/20/50mm H2O |
500Pa
50 mm H2O |
less than 30kPa
less than 0.3kgcm2G |
|
Response (to ±2% F.S.) |
3 sec. |
2 sec. |
3 sec. |
2 sec. |
|
Flow Rate Signal |
Output 0-5 Vdc |
Output 0-5 Vdc, Set 0-5 Vdc |
|
Leak Integrity |
Less than 5x10-11
atm·cc/sec (He) |
|
Wetted Materials |
SS 316L |
SS 316L, Teflon (UC treated
SS 316L for MO type) |
|
Sensor Tube |
Inner polished SS 316L |
|
Standard Fittings |
1/16" SWL, 1/8" VCR
1/16" Original |
1/8" SWL
1/8" VCR |
1/4" SWL
1/4" VCR |
1/16" SWL, 1/8" VCR
1/16" Original |
1/8" SWL
1/8" VCR |
1/4" SWL
1/4" VCR |
|
Weight |
Approx. 450 g |
Approx. 700 g |